1,1,1,3,3,3-hexamethyldisilazane

Substance identity

Identification

Display Name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Type of Substance

Composition:

mono-constituent substance

Origin:

organic

Substance Identifiers

Trade name

1,1,1,3,3,3-Hexamethyldisilazan

A-166

Dow Corning(R) 4-2839 INT (PL fluid)

Dow Corning(R) Z-6079 silazane

Dynasylan(R) HMDS

Hexamethyldisilazane

SC3100Z

SH4002ZNC911

SH8270U

SH9151U

SH9161U

SL2501A

SL3358A

SL3358B

SL7230A

SL7230B

SL7240A

SL7240B

SL7250ATT903

SL7250ATT905

SL7250BTT903

SL7250BTT905

SL7260A

SL7260ATT903

SL7260ATT907

SL7260B

SL7260BTT903

SL7260BTT907

SL7270A

SL7270ATT903

SL7270B

SL7270BTT903

SL8601ACG791

SL8601ACG792

SL8601BCG791

SL8601BCG792

SL8609A

SL8609ACG792

SL8609B

SL8609BCG792

SL8640A

SL8640B

SL9051A

SL9051B

SL9055A

SL9055B

SL9340A

SL9340B

SL9805ARM102

SM8110Z

SM8120Z

Compositions

Boundary Composition(s)

1,1,1,3,3,3-Hexamethyldisilazane, CAS 999-97-3; EC No. 213-668-5

Impurity

State Form:

liquid

Degree of purity:

> 97 - <= 100 % (w/w)

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Impurity 1

Reference substance name:

[amino(dimethyl)silyl]methane

CAS Number:

7379-79-5

Molecular formula:

C3H11NSi

IUPAC Name:

[amino(dimethyl)silyl]methane

1,1,1,3,3,3-Hexamethyldisilazane, CAS 999-97-3; EC No. 213-668-5

State Form:

liquid

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Legal Entity Composition(s)

Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-

State Form:

liquid

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

1,1,1,3,3,3-hexamethyldisilazane

State Form:

liquid

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

1,1,1,3,3,3-Hexamethyldisilazane

State Form:

liquid

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

1,1,1,3,3,3-Hexamethyldisilazane

Impurity

State Form:

liquid

Degree of purity:

>= 94 - <= 100 % (w/w)

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Impurity 1

Reference substance name:

[amino(dimethyl)silyl]methane

CAS Number:

7379-79-5

Molecular formula:

C3H11NSi

IUPAC Name:

[amino(dimethyl)silyl]methane

1,1,1,3,3,3-Hexamethyldisilazane

Impurity

State Form:

liquid

Degree of purity:

>= 98 - < 100 % (w/w)

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Impurity 1

Reference substance name:

[amino(dimethyl)silyl]methane

CAS Number:

7379-79-5

Molecular formula:

C3H11NSi

IUPAC Name:

[amino(dimethyl)silyl]methane

Hexamethyldisilazane

State Form:

other: Imported as a mixture of no-metal treated surfaces.

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

hexamethyldisilazane

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Hexamethyldisiloxane (HMDZ)

State Form:

other: Imported as a mixture of no-metal treated surfaces.

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Hexamethyldisilazane

State Form:

liquid

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Composition 14

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

1,1,1,3,3,3-hexamethyldisilazane

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

Hexamethyldisilazane

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine

HEXAMETHYLDISILAZANE

State Form:

liquid

Constituent 1

Reference substance name:

1,1,1,3,3,3-hexamethyldisilazane

EC Number:

213-668-5

EC Name:

1,1,1,3,3,3-hexamethyldisilazane

CAS Number:

999-97-3

Molecular formula:

C6H19NSi2

IUPAC Name:

bis(trimethylsilyl)amine